钨灯丝扫描电镜拍图最佳状态的维护与思考

摘要

钨灯丝扫描电镜最佳工作状态的维护需要处理好仪器的硬件、附件和附属的工具、工作参数的调节与维护、样品处理以及保养等工作。这篇文章详细分析了这些影响因素，同时提出了一些相应的维护方法。%Best in tungsten filament SEM image maintenance should control the instrument hardware , accessories and ancillary tools ,specification ,sample handling and maintenance. T he paper analyzed in de-tail each of these factors ,w hile detailing maintenance of corresponding methods.