X射线衍射全谱拟合定量分析方法研究

摘要

X-ray diffraction method (XRD) includes two tasks: qualitative and quantitative analysis. The three ratios of (Si +TiO2) are analyzed by XRD, the quantitative analysis data were obtained from the rietveld analyses . The results show that the compositions are close to the real ratio of the samples. The Rietveld methord is reliable for the quantitative phase analysis, and the relative standard deviation was ±2% ( n = 3 ). The results demonstrate that X-ray powder diffraction combining with the rietveld refinement method is an accurate, convenient and speed-up method.%利用X射线衍射仪对不同配比的Si和TiO2样品进行分析,通过三种定量分析方法(峰高法、积分强度法、全谱结构拟合法)进行计算,并进行误差分析.结果表明:三种定量分析方法中,全谱结构拟合法最优,相对误差为±2％(n=3),误差最小.X射线衍射全谱拟合法是一种精确,快速的定量方法.