离子的轰击对Si衬底上金刚石核附着力的影响

摘要

The enhanced nucleation process of diamond by negative substrate bias was investigated by scanning electron microscopy and atomic force microscopy. The mechanism of enhanced joint adhesion of diamond nuclei on Si substrate by ion bombardment was theoretically approached, and the relationship between negative substrate bias and adhesion of diamond nuclei on Si substrate was given.%利用扫描电子显微镜和原子力显微镜对负衬底偏压增强金刚石核化的过程进行了分析，从理论上探索了负衬底偏压作用下离子的轰击效应增强金刚石核在Si衬底上附着力的机理，给出了金刚石核与衬底的附着力和衬底负偏压之间的关系.