高速高饱和单行载流子光探测器的设计与分析

摘要

In this paper, an InP-based mesa-structure uni-traveling-carrier photodetector is designed. By adopting Gaussian doping scheme in the absorption layer and incorporating an appropriate cliff layer, high speed and high saturation current characteristics are both achieved simultaneously. For the device with a 14 µm2 active area, the simulated results indicate that the bandwidth reaches 58 GHz and DC saturation current increases up to 158 mA at a reverse bias of 2 V. Under high optical injection, the bandwidth degradation and current saturation are studied, which are caused by energy band shift and electric field collapse.%设计了一种InP基的背入射台面结构的单行载流子光探测器.通过在吸收层中采取高斯型掺杂界面及引入合适厚度和掺杂浓度的崖层,使得光探测器同时具备了高速和高饱和电流特性．理论分析表明,在光敏面为14µm2、反向偏压为2 V条件下,该器件的3 dB带宽可达58 GHz,直流饱和电流高达158 mA.在大功率光注入条件下,详细分析了光探测器带宽降低和电流饱和现象,得出能带偏移和电场坍塌是其根本原因的结论.