光纤法布里-珀罗干涉温度压力传感技术研究进展

摘要

光纤法布里-珀罗干涉温度和压力传感器具有灵敏度高、制作简单、成本低、体积小和抗电磁干扰能力强等优点,己被广泛应用于军事和民用领域.在某些环境恶劣,如具有强电磁干扰和腐蚀性,或提供给传感器的安装空间非常有限的特殊工业领域,微型光纤温度和压力传感器发挥着重要的作用,国内外诸多高校、科研院所都在对其进行研究.本文综述了光纤法布里-珀罗干涉仪的基本原理、制备技术、及其压力和温度传感应用的研究进展.详细介绍了湿法化学腐蚀制备法、电弧放电制备法、飞秒激光制备法、聚合物辅助制备法等常见光纤法布里-珀罗腔传感器的制作工艺,分析了不同制作工艺的优缺点;详细介绍了光纤法布里-珀罗干涉仪在温度传感、压力传感和温压一体传感领域的应用;最后对光纤法布里-珀罗干涉温度压力传感器的发展进行了总结和展望.%Optical fiber sensors based on Fabry-Perot interferometer (FPI) have attracted intensive attention for sensing applications in temperature and pressure measurement,owing to their compact,small size,fast responses,high resolution,high sensitivity,good stability,and resistance to electromagnetic interference.It's known that the in-fiber optic interferometers based on single-mode fibers can exhibit compact structures,easy fabrication and low cost.In this paper,firstly,the basic principle of in-fiber FPIs is introduced.Secondly,we review several kinds of typical in-fiber FPIs formed in single-mode fibers fabricated with different post-processing techniques,such as chemical etching,arc discharge,femtosecond laser micromachining,and polymer coating,etc.Finally,the optical sensors based on in-fiber FPIs,with a capability of simultaneous multi-parameter sensing of temperature and pressure,are summarized and prospected.