首页> 外国专利> fabry - perot - interferometer - unit, a method for operating a fabry - perot - interferometer - unit and a method for producing a fabry - perot - interferometer - unit

fabry - perot - interferometer - unit, a method for operating a fabry - perot - interferometer - unit and a method for producing a fabry - perot - interferometer - unit

机译:法布里-珀罗-干涉仪-单元,一种用于操作法布里-珀罗-干涉仪-单元的方法以及一种制造法布里-珀罗-干涉仪-单元的方法

摘要

The invention relates to a fabry - perot - interferometer - unit (100) with a first mirror element (102), a second mirror element (104) and at least one plasmonic filter element (112). The first mirror element (102) and the second mirror element (104) are arranged opposite one another or be arranged around an optical resonator (106) with at least a first light path (108) and a second light path (110) to form, wherein the first light path (108) a first measuring channel of the fabry - perot - interferometer - unit (100) is assigned and the second light path (110) a second measuring channel of the fabry - perot - interferometer - unit (100) is associated with. The plasmid moni surface filter element (112) is integrated in the first light path (108) and outside of the second light path (110) can be arranged or arranged a along the first light path (108) light beam which is guided to filter.
机译:具有第一镜元件(102),第二镜元件(104)和至少一个等离子体滤波器元件(112)的织物-佩罗-干涉仪-单元(100)。第一镜元件(102)和第二镜元件(104)彼此相对布置或围绕光谐振器(106)布置,至少具有第一光路(108)和第二光路(110)以形成,其中分配了第一光路(108)晶圆厂-珀罗-干涉仪-单元(100)的第一测量通道,第二光路(110)的晶圆厂-珀罗-干涉仪-单元(100)的第二测量通道) 与..相联系。质粒莫尼表面过滤器元件(112)被集成在第一光路(108)中,并且第二光路(110)的外部可以被布置或布置为沿着第一光路(108)被引导以过滤的光束。 。

著录项

  • 公开/公告号DE102016217846A1

    专利类型

  • 公开/公告日2018-03-22

    原文格式PDF

  • 申请/专利权人 ROBERT BOSCH GMBH;

    申请/专利号DE201610217846

  • 申请日2016-09-19

  • 分类号G01J3/26;G01J3/28;B81B7/02;

  • 国家 DE

  • 入库时间 2022-08-21 12:34:33

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