Fabry-Perot interferometer unit and method for producing a Fabry-Perot interferometer unit

摘要

The present invention provides a Fabry-Perot interferometer unit (FP), comprising a carrier substrate (TS) with a through opening (NA), the through opening (NA) having a numerical aperture; a first mirror element (SP1) and a second mirror element (SP2), which are arranged one above the other on the carrier substrate (TS) and spaced apart from one another, the first mirror element (SP1) and the second mirror element (SP2) covering the through opening (NA), and the first mirror element (SP1) and the second mirror element (SP2) each comprise a dielectric Bragg mirror, which comprises at least two plane-parallel high-index mirror layers (LS1; LS2) and an intermediate low-index mirror layer (LSP), the first mirror element (SP1) and the second mirror element (SP2) comprise an outer region (AB), which connects laterally outside of the through opening (NA) and is free of mechanical contact with the carrier substrate (TS), and comprise a suspension region (AufB), which laterally outside of the outer region (AB) adjoins this and is in mechanical contact with the carrier substrate (TS), wherein the outer area (AB) and / or the hanging area (AufB) comprises a material with a different tension state than the first and second mirror layers (LS1; LS2) in an area of the through opening (NA).