Fabry-Perot filter, a Fabry-Perot interferometer having the same, and a method for manufacturing a Fabry-Perot filter

摘要

PROBLEM TO BE SOLVED: To suppress warp of a Fabry-Perot filter caused by thermal stress.SOLUTION: The Fabry-Perot filter has: a lower mirror formed on a substrate; a spacer layer formed partially on the lower mirror; and an upper mirror formed on the lower mirror while being supported by the spacer layer. The upper mirror and the lower mirror are each optical multilayer film mirrors which have: a first high refractive index film and a second high refractive index film each having first refractive index; and a low refractive index layer having second refractive index smaller than the first refractive index, and in which the first high refractive index film and the second high refractive index film are arranged in an opposing manner with the low refractive index layer laid between the films. Then, the spacer layer is made of the same material as that of the first high refractive index film and the second high refractive index film.