绝对测量小距离的波长扫描-光纤双干涉仪系统

摘要

An optical scanning, fiber dual extrinsic Fabry-Perot interferometer (DEFPI) system for measuring small distance is presented. Taking the scanning wavelength as an "inter-converter"to compare the gap length of the sensing head with a reference length, we may obtain, in practice, a semi-absolute measurement of the sensing head length. The measurement is independent from the wavelength scanning accuracy and the reference cavity length can be self-calibrated simply by changing the sensing length with a known distance.%介绍了用于测量小位移的波长扫描-光纤法布里-珀罗干涉仪系统.用扫描波长作为"中介",比较参考腔长和传感腔长,可以"准绝对"地测量传感腔的长度.这个测量与波长扫描的准确度无关,仅依赖于参考腔的长度.而通过将传感腔改变一个已知距离,就可以简单地"自标定"参考腔的长度.