High-accuracy absolute distance measurement by means of wavelength scanning heterodyne interferometry

摘要

It is easy to measure length accurately by means of optical interferometry. However, the measurement range of a single-frequency interferometer is limited to less than half the wavelength without a moving carriage to count interference fringes. To resolve this problem, a frequency scanning method had been developed. However, its phase resolution is not so high that the integer part of the order of the interference fringe can be accurately determined. We proposed a method to measure any length absolutely and accurately, by combining a high-resolution phase measurement technique with a frequency scanning technique. In this paper, -this method was investigated by using a frequency scanning heterodyne interferometer. With heterodyne phase measurement, we achieved high resolution, higher than quarter wavelength, using the wide-range frequency scanning method. This means that we can measure the absolute length with nanometre accuracy, since the integer part of the order of the interference fringe for a wavelength is determined with the frequency scanning. We measured distances up to about 4 mm with an accuracy of about 3 nm.