化学气相沉积法制备钨管性能研究

摘要

以WF6、H2为原料，采用化学气相沉积法沉积制备出不同直径难熔金属钨管。对不同沉积温度(500℃，600℃，700℃)沉积制备钨管的纯度、密度、显微硬度、残余应力及钨管强度进行了测试与分析研究。研究结果表明：沉积制备钨管具有高纯度和高致密度；随着沉积温度、钨管半径(3～20 mm)不同，显微硬度值在500～800 HV之间；沿钨管圆周、半径方向存在较大残余应力；抗拉强度范围在300～500 MPa.%Refractory metal tungsten tubes of different diameter have been prepared successfully by chemical vapor deposition with the mixture of WF6 and H2. The purity, density, micro-hardness, residual stress and strength of tungsten tubes at different deposition temperatures ( 500 ℃ , 600 ℃ , 700 ℃ ) were tested and analyzed. The results show that tungsten tubes prepared in this way demonstrate high purity and high density. At different deposition temperatures, micro-hardness values of tungsten tube of different radius(3 -20 mm) change between 500 and 800 HV. A relatively high residual stress exists along the tungsten tube circumference, radius of the direction. And the tensile strength range is 300 -500 Mpa.