Characterization and tribological application of diamond-like carbon (DLC) films prepared by radio-frequency plasma-enhanced chemical vapor deposition (RF-PECVD) technique

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• 来源
  《中国高等学校学术文摘·材料科学》 |2009年第4期|409-414|共6页
• 作者

  Ning CAO; Zhen-yi FEI; Yong-xin QI; Wen-wen CHEN; Lu-lu SU; Qi WANG; Mu-sen LI;

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• 作者单位

  Key Laboratory of Liquid Structure and Heredity of Materials Ministry of Education, Shandong University, Jinan 250061, China;

  Key Laboratory of Liquid Structure and Heredity of Materials Ministry of Education, Shandong University, Jinan 250061, China;

  Key Laboratory of Liquid Structure and Heredity of Materials Ministry of Education, Shandong University, Jinan 250061, China;

  Key Laboratory of Liquid Structure and Heredity of Materials Ministry of Education, Shandong University, Jinan 250061, China;

  Key Laboratory of Liquid Structure and Heredity of Materials Ministry of Education, Shandong University, Jinan 250061, China;

  Key Laboratory of Liquid Structure and Heredity of Materials Ministry of Education, Shandong University, Jinan 250061, China;

  Key Laboratory of Liquid Structure and Heredity of Materials Ministry of Education, Shandong University, Jinan 250061, China;

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