首页> 外文学位 >Periodic error in heterodyne interferometry: Measurement, uncertainty, and elimination.
【24h】

Periodic error in heterodyne interferometry: Measurement, uncertainty, and elimination.

机译:外差式干涉仪中的周期性误差:测量,不确定性和消除。

获取原文
获取原文并翻译 | 示例

摘要

The purpose of this study is to construct, test, and verify a new heterodyne displacement measuring interferometer design that eliminates the current accuracy limitation imposed by periodic error, which appears as a cyclical oscillation of the measured displacement about the true value during motion. In the new design, the two (heterodyne) frequencies are generated and spatially separated using acousto-optic modulators. By removing the potential for overlap and frequency mixing within the interferometer, periodic error is eliminated. The new concept replaces the traditional method of 'polarization coding', where the two beams (with different frequencies) are initially coincident with orthogonal polarization states and then separated using polarization dependent optics. Experimental results are presented for two arrangements of the new design at multiple target velocities. Spectral content (collected using an analog spectrum analyzer) is analyzed to verify zero periodic error. These results are compared to data collected using a traditional polarization coded heterodyne interferometer with variations in the optical alignment to demonstrate different levels of first and second order periodic error. Again, frequency spectrum data are provided.
机译:这项研究的目的是构建,测试和验证一种新的外差位移测量干涉仪设计,该设计消除了周期性误差带来的电流精度限制,周期性误差表现为运动过程中测得的位移围绕真实值的周期性振荡。在新设计中,使用声光调制器生成两个(外差)频率并在空间上分离。通过消除干涉仪内重叠和混频的可能性,可以消除周期性误差。新概念取代了传统的“偏振编码”方法,在传统方法中,两个光束(具有不同的频率)最初与正交偏振态重合,然后使用偏振相关的光学器件进行分离。提出了在多种目标速度下两种新设计方案的实验结果。分析频谱含量(使用模拟频谱分析仪收集),以验证零周期性误差。将这些结果与使用传统偏振编码外差干涉仪收集的数据进行比较,这些数据在光学对准方面有所变化,以证明不同程度的一阶和二阶周期性误差。同样,提供频谱数据。

著录项

  • 作者

    Kim, Hyo Soo.;

  • 作者单位

    University of Florida.;

  • 授予单位 University of Florida.;
  • 学科 Engineering Mechanical.
  • 学位 Ph.D.
  • 年度 2009
  • 页码 174 p.
  • 总页数 174
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号