Review of self-referenced measurement algorithms： Bridging lateral shearing interferometry and multi-probe error separation

著录项

• 来源
  《机械工程前沿：英文版》 |2017年第2期|P.143-157|共15页
• 作者

  Dede ZHAI12; Shanyong CHEN1; Ziqiang YIN1; Shengyi LI1;

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• 作者单位

  [1]College of Mechatronic Engineering and Automation, National University of Defense Technology, Changsha 410073, China [2]Hu＇nan Key Laboratory of Ultra-precision Machining Technology, Changsha 410073, China;

  [1]College of Mechatronic Engineering and Automation, National University of Defense Technology, Changsha 410073, China [2]Hu＇nan Key Laboratory of Ultra-precision Machining Technology, Changsha 410073, China;

  [1]College of Mechatronic Engineering and Automation, National University of Defense Technology, Changsha 410073, China [2]Hu＇nan Key Laboratory of Ultra-precision Machining Technology, Changsha 410073, China;

  [1]College of Mechatronic Engineering and Automation, National University of Defense Technology, Changsha 410073, China [2]Hu＇nan Key Laboratory of Ultra-precision Machining Technology, Changsha 410073, China;

  [1]College of Mechatronic Engineering and Automation, National University of Defense Technology, Changsha 410073, China [2]Hu＇nan Key Laboratory of Ultra-precision Machining Technology, Changsha 410073, China;

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• 原文格式 PDF
• 正文语种 CHI
• 中图分类 TH161.21;
• 关键词

  误差分离技术 横向剪切干涉 测量算法 多探头 自参考 剪切干涉法 超精密加工技术 桥接;

  机译：误差分离技术 横向剪切干涉 测量算法 多探头 自参考 剪切干涉法 超精密加工技术 桥接;