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Electrochemically Prepared Graphene Field Effect Transistors and Magnetoresistive Devices.

机译:电化学制备的石墨烯场效应晶体管和磁阻器件。

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摘要

Electrochemical deposition is a class of techniques used to deposit coatings onto conductive substrates that are relevant to everyday products such as integrated circuits, magnetic recording devices, and multilayer structures. This dissertation will discuss the use of electrochemical depositions to fabrication nano/microelectronic devices.;Chapter 1 demonstrates the electrodeposition of pinhole free, low-k dielectric thin films on graphene, and the use of these films a dielectric for graphene field effect transistors (FET). The electro-oxidation of phenolic compounds were shown to form ultrathin (∼3-4 nm) insulating polymers on the surface of mechanically exfoliated graphene. The performance of these top-gated FET devices, which were successfully gated through the polymer with low leakage currents, will be discussed. These insulating phenolic polymers were also shown to assist the growth of hafnium oxide deposited by ALD to form higher dielectric films.;Chapters 2 and 3 discuss the electrodeposition of bismuth and manganese-bismuth alloys respectively. Bismuth was electrodeposited on ferromagnetic nanojunctions to create spin valve devices. The magnetoresistance of the devices exhibited a parabolic resistance response to a magnetic field, typical for bismuth, with an additional small negative magnetoresistance (0.1%). Manganese-bismuth, a ferromagnetic metal with a high coercivity, was prepared by electrodeposition for the first time. The films were prepared with single and dual bath depositions from various metal ion containing solutions. The films prepared from the dual bath depositions exhibited large coercivities (>2.5 kOe) after being annealed at 269°C.
机译:电化学沉积是一类用于将涂层沉积到与日常产品(例如集成电路,磁记录设备和多层结构)相关的导电基材上的技术。本文将讨论电化学沉积在纳米/微电子器件制造中的应用。第一章演示了无针孔,低k介电薄膜在石墨烯上的电沉积,以及这些薄膜在石墨烯场效应晶体管(FET)中的电介质用途。 )。酚类化合物的电氧化显示在机械剥离的石墨烯表面形成超薄(约3-4 nm)绝缘聚合物。将讨论这些顶部栅极FET器件的性能,这些器件已成功通过低泄漏电流通过聚合物选通。这些绝缘的酚醛聚合物还被证明有助于ALD沉积的氧化ha的生长,从而形成更高的介电膜。第二章和第三章分别讨论了铋和锰-铋合金的电沉积。铋被电沉积在铁磁纳米结上以形成自旋阀装置。器件的磁阻表现出对磁场的抛物线电阻响应(典型的是铋),并具有较小的负磁阻(0.1%)。首次通过电沉积法制备了高矫顽力的铁磁性金属锰铋。膜是用各种含金属离子的溶液进行单浴和双浴沉积而制得的。由双浴沉积制备的薄膜在269°C退火后表现出较大的矫顽力(> 2.5 kOe)。

著录项

  • 作者

    Wymore, Benjamin B.;

  • 作者单位

    The University of Nebraska - Lincoln.;

  • 授予单位 The University of Nebraska - Lincoln.;
  • 学科 Physical chemistry.;Inorganic chemistry.
  • 学位 Ph.D.
  • 年度 2014
  • 页码 208 p.
  • 总页数 208
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

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