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Controlled microcutting tests on glassy materials and single crystal silicon.

机译:在玻璃状材料和单晶硅上进行受控的微切割测试。

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摘要

Precision machining and grinding of brittle materials requires good surface finish and no fracture damage in the workpiece. Considering grinding as a multi-scratch process, the response of a single cutting grain and the damage transitions produced by the cutting action as the load on the grain is varied, will be of primary interest. The present work addresses fracture initiation issues during microcutting tests using a single cutting grain.; Glass (soda-lime and borosilicate), semiconductor silicon, and SiC thin films were used as the test materials. A controlled loading system consisting of a PZT actuator, motorized stage, and an acoustic emission sensor, was used for the tests here. The PZT actuator was used to achieve force controlled loading profiles and the motorized micrometer stage was used for providing the translation during microcutting tests. Acoustic emission was used as the tool for detecting the cracking threshold during the tests. The fracture damage morphologies were determined by scanning electron microscopy. A Vickers diamond indenter was used as the tool.; In the case of borosilicate glass, optimal tool geometry to produce minimal fracture damage was established. Detailed investigations of sub-surface damage were undertaken. An interesting triggering effect due to residual stress was observed. This was well supported by stress models. In addition, detailed investigations of indentation fracture were undertaken using soda-lime glass. In the case of SiC coatings, the fracture damage morphologies and adhesion studies were conducted. These are of wide importance considering their potential use in engineering components to minimize erosion and wear damage. In the case of silicon, crystallographic directions and indenter orientations to produce minimal fracture damage were established. Microcutting tests showed the formation of ductile chips and the presence of an amorphous phase. The latter was attributed to the formation of a high-pressure metallic phase. Interesting periodic features were observed consistently and uniquely in the microcutting grooves for silicon. The loading rate effects and the features in the grooves prompted tests using a diamond turning machine (DTM) and a force sensing system, since much higher cutting speeds can be employed in this case with a much stiffer setup. The force sensor yielded similar results, and also was proven useful to detect crack-initiation thresholds in the case of thicker soda-lime glass samples, since acoustics could not be used in the case of soda-lime glass.
机译:脆性材料的精密加工和磨削需要良好的表面光洁度,并且不会对工件造成断裂损伤。考虑到磨削是一个多划痕过程,单个切削谷物的响应以及随着谷物上负载的变化而由切削作用产生的损伤过渡将是主要关注点。目前的工作解决了在使用单一切削晶粒的微切削试验中断裂引发的问题。玻璃(苏打石灰和硼硅酸盐),半导体硅和SiC薄膜用作测试材料。在此测试中使用了由PZT执行器,电动平台和声发射传感器组成的受控加载系统。 PZT执行器用于获得受力控制的负载曲线,电动千分尺用于在微切削测试过程中提供平移。在测试过程中,声发射被用作检测裂纹阈值的工具。通过扫描电子显微镜确定断裂损伤的形态。使用维氏金刚石压头作为工具。在硼硅酸盐玻璃的情况下,建立了最佳的工具几何形状以产生最小的断裂损伤。对地下破坏进行了详细调查。观察到由于残余应力引起的有趣的触发效果。压力模型很好地支持了这一点。另外,使用钠钙玻璃进行了压痕断裂的详细研究。对于SiC涂层,进行了断裂损伤的形貌和附着力研究。考虑到它们在工程部件中的潜在用途,以最大程度地减少腐蚀和磨损损害,这些因素非常重要。在硅的情况下,建立了晶体学方向和压头取向以产生最小的断裂损伤。显微切割试验显示出韧性碎片的形成和非晶相的存在。后者归因于高压金属相的形成。在硅的微刻槽中一致且独特地观察到有趣的周期性特征。装载率的影响和凹槽中的特征促使使用金刚石车床(DTM)和力感应系统进行测试,因为在这种情况下,可以采用更高的切削速度,并且刚性更高。力传感器产生了相似的结果,并且在钠钙玻璃样品较厚的情况下也被证明可用于检测裂纹起始阈值,因为在钠钙玻璃的情况下无法使用声学。

著录项

  • 作者

    Tanikella, Brahmanandam V.;

  • 作者单位

    North Carolina State University.;

  • 授予单位 North Carolina State University.;
  • 学科 Engineering Materials Science.; Engineering Mechanical.
  • 学位 Ph.D.
  • 年度 1996
  • 页码 196 p.
  • 总页数 196
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 工程材料学;机械、仪表工业;
  • 关键词

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