Characterization of a rotating polarizer and analyzer ellipsometer for the study of plasma polymerized films.

摘要

A detailed mathematical derivation and a complete experimental characterization of two to one rotating polarizer/analyzer photometric ellipsometer are presented. The error analysis, alignment, calibration and testing on reference samples are also discussed. The aging and the change in the refractive index of low temperature plasma polymerized trimethylsilane films are studied in the visible spectral range. A preliminary attempt to understand the chemistry of the aging process is presented using the Bruggemann Effective Medium Approximation. Some light is shed on the impact of exposing these films to ultraviolet light.