rotating analyzer type in situ ellipsometer

摘要

The present invention uses a He-Ne laser as a light source, adopts a rotating polarizer-type photometric method, and uses a coaxial structure so that it can be easily mounted on a conventional vacuum chamber. The non-contact, optical type short wavelength in situ ellipsometer, which can measure and analyze situ, has a polarizer module 20 having a first flange on one side, and an analyzer module 40 having a second flange on the other side. Using the main control computer 10 installed in the vacuum chamber 80 and the driving program, the automatic temperature control and the automatic elliptic constant measurement are performed in situ through the electronic box 70 and the temperature controller 60 in real time. Characterized in that.