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Beam splitting analyzer means in rotating compensator ellipsometer
Beam splitting analyzer means in rotating compensator ellipsometer
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机译:旋转补偿器椭圆仪中的分束分析仪装置
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摘要
Disclosed is a rotating compensator sample system investigation system which includes a source of a beam of electromagnetic radiation, a polarizer, a stage for supporting a sample system, a beam splitting analyzer, and at least two detector systems which are positioned each to intercept a different of the at least two electromagnetic beams which emerge from the beam splitting analyzer. Also disclosed is a regression based approach to calibration which simultaneously extracts a sample system PSI and DELTA.
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