Simulations of a miniaturized scanning electron microscope.

摘要

This research was in support of the development of a miniaturized scanning electron microscope (mini-SEM). Commercially available electron microscopes are large which requires scientist to transport materials for investigation back to the lab. The objective of this investigation was to determine the conditions for optimal performance of the mini-SEM; therefore, the significant results were those related to the current and resolution of the resulting electron beam at the sample plane. The current incident on the sample plane depends on the amount of current produced by the electron gun and then transmitted through various apertures in the electron focusing column of the mini-SEM. Two electron gum types and the electron focusing column were simulated and comparisons were made to experimental results to provide optimized working conditions.