Numerical analysis to verifying the performance of condenser magnetic lens in the scanning electron microscope.

摘要

The research aims to analysis of condenser magnetic lens in the scanning electron microscope using numerical analysis software and geometrical optics to know the behavior and characteristics of the electron beam and ability to focus it to decrease magnitude of aberrations which contribute decrease in a clear image and estimate the beam spot size that incident on the specimen surface by changing the distance between the magnetic poles down to the model that gives the best focal properties.