Erosion and Roughness Modeling in Abrasive Jet Micro-machining of Brittle Materials.

摘要

The effect of particle size, velocity, and angle of attack was investigated on the roughness and erosion rate of unmasked channels machined in borosilicate glass using abrasive jet micro-machining (AJM). Single impact experiments were conducted to quantify the damage due to the individual alumina particles. Based on these observations, an analytical model from the literature was modified and used to predict the roughness and erosion rate.;A numerical model was then developed to simulate the brittle erosion process leading to the creation of unmasked channels as a function of particle size, velocity, dose, impact angle and target material properties. For the first time, erosion was simulated using models of two damage mechanisms: crater removal due to the formation and growth of lateral cracks, and edge chipping. Accuracy was further enhanced by simulating the actual relationship between particle size, velocity and radial location within the jet using distributions measured with high-speed laser shadowgraphy.;The process of post-blasting AJM channels with abrasive particles at a relatively low kinetic energy was also investigated in the present work by measuring the roughness reduction of a reference unmasked channel in borosilicate glass as a function of post-blasting particle size, velocity, dose, and impact angle. The numerical model was modified and used to simulate the post-blasting process leading to the creation of smooth channels as a function of particle size, velocity, dose, impact angle, and target material properties.;Finally, the effect of alumina particle kinetic energy and jet impact angle on the roughness and erosion rate of channels machined in borosilicate glass using abrasive slurry jet micro-machining (ASJM) was investigated. The analytical and numerical models derived for AJM, were found to predict reasonably well the roughness and the erosion rate of ASJM channels, despite the large differences in the fluid media, flow patterns, and particle trajectories in AJM and ASJM.