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ABRASIVE GRAINS, ABRASIVE SLURRY AND METHOD FOR POLISHING HARD, BRITTLE MATERIALS, AND METHOD FOR PRODUCING HARD, BRITTLE MATERIALS
ABRASIVE GRAINS, ABRASIVE SLURRY AND METHOD FOR POLISHING HARD, BRITTLE MATERIALS, AND METHOD FOR PRODUCING HARD, BRITTLE MATERIALS
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机译:磨料,磨料浆和对硬质脆性材料进行抛光的方法以及硬质脆性材料的生产方法
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摘要
Provided are abrasive grains and an abrasive slurry that make it possible to achieve both higher polishing speed and surface smoothness on hard, brittle materials such as sapphires. Abrasive grains to be used to polish hard, brittle materials, the abrasive grains characterized by containing connected particles having one or more necks and being an inorganic oxide powder having an average particle size of 3 μm or less.
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