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Using electron beam lithography to make electrodes for single molecule electronics.

机译:使用电子束光刻制造用于单分子电子设备的电极。

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While conductivity measurements of organic molecules have been reported, electrical conductivity measurement of single inorganic metallic molecules has not been accomplished yet. In this thesis, we present a procedure to fabricate Cr: Au electrodes on thermally oxidized silicon wafers with repeatable gaps of 40 nm using electron-beam lithography and thermal deposition. After the electrodes have been formed using conventional electron-beam lithography technique, electrolysis has been used to apply additional Au to the electrodes, closing the electrodes to a sub 3 nm gap. Some coupled Raman spectral measurements, along with bulk electrical conductivity measurements have been performed on the ligands of the proposed molecules listed in this thesis. A monolayer of ligands has exhibited a symmetric current-voltage curve, and the Raman lines are shifted and broadened under the influence of the applied field.
机译:尽管已经报道了有机分子的电导率测量,但是尚未完成单个无机金属分子的电导率测量。在本文中,我们提出了一种利用电子束光刻和热沉积技术在可重复缝隙为40 nm的热氧化硅晶片上制备Cr:Au电极的方法。在使用常规电子束光刻技术形成电极之后,已使用电解将额外的Au施加到电极上,将电极封闭到3 nm以下的间隙。对本文列出的拟议分子的配体进行了一些耦合的拉曼光谱测量以及整体电导率测量。单分子配体已显示出对称的电流-电压曲线,并且在施加电场的影响下拉曼线移动并加宽。

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