A highly-integrated polymer-based microfluidic device for disposable applications is presented. This device is plastic injection molded and exhibits three levels of integration. First, fluidic interconnects are monolithically formed with the device, enabling robust manufacturing and high-pressure operation (>500 psi). Second, a metal layer is lithographically patterned in the form of microheaters. Finally, a thermally-sensitive hydrogel valve is integrated into the channel. The valve is normally closed at room temperature. Upon heating to above the lower critical solution temperature of 32°C, the polymer valve becomes hydrophobic, shrinks while forming large pores, and permits flow. The device has been actuated reliably over 100 times with no apparent degradation.;The device is polymer-based and therefore much less expensive than microfluidic chips based on traditional substrates. The fabrication process consists of a five-step process. First, the cyclic olefin copolymer (COC) chip is injection molded with a single 100 x 100 mum microchannel. Second, before enclosing the channel, 20nm of chrome and 100nm of gold are thermally evaporated onto a COC cover slide. The metal layers are then etched to define 25 mum heater traces using standard photolithographic procedures. Third, the two parts of the chip are bonded by exposing the structured-half of the chip to solvent vapor and applying pressure. Alignment between the channel and the heater is obtained using a custom alignment fixture under an optical microscope. Fourth, the walls of the channel are surface modified to ensure covalent attachment of the valve to the channel wall. Fifth, the valve is prepared in situ by filling the channel with a polymerization solution and exposing selected regions with UV light through a photomask. A complete working prototype can be produced in less than two hours, demonstrating exceptional manufacturability.;This level of integration affords many advantages. Compared with off-chip heating, the valves exhibit a 400% faster turn-off response using the integrated on-chip heaters. Reliable dosing of less than 5 nl aliquots is demonstrated. Additionally, higher spatial resolution is possible with on-chip heaters allowing for higher channel densities and peristaltic pumping.
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机译:提出了一种用于一次性应用的高度集成的基于聚合物的微流体装置。该设备是塑料注塑成型的,具有三个集成级别。首先,流体互连与设备整体形成,从而实现坚固的制造和高压操作(> 500 psi)。其次,以微加热器的形式对金属层进行光刻图案化。最后,将热敏水凝胶阀集成到通道中。该阀通常在室温下关闭。当加热到低于32°C的较低临界溶液温度时,聚合物阀变成疏水的,收缩而形成大孔,并允许流动。该设备已经可靠地驱动了100次以上,没有明显的退化。该设备是基于聚合物的,因此比基于传统基板的微流体芯片便宜得多。制造过程包括五个步骤。首先,将环状烯烃共聚物(COC)芯片用单个100 x 100微米的微通道注塑成型。其次,在封闭通道之前,将20nm的铬和100nm的金热蒸发到COC盖玻片上。然后使用标准光刻程序蚀刻金属层,以定义25个妈妈加热器轨迹。第三,通过将芯片的结构化一半暴露在溶剂蒸汽中并施加压力,将芯片的两个部分粘合在一起。通道和加热器之间的对准是使用光学显微镜下的定制对准固定装置获得的。第四,通道壁经过表面修饰,以确保阀门与通道壁的共价结合。第五,通过用聚合溶液填充通道并通过光掩模使选定区域暴露于紫外光来就地制备阀门。可以在不到两个小时的时间内生产出完整的工作原型,这证明了其出众的可制造性。这种集成水平具有许多优势。与芯片外加热相比,使用集成的芯片上加热器,阀门的关闭响应速度提高了400%。证明了少于5 nl等份的可靠剂量。此外,片上加热器可以实现更高的空间分辨率,从而实现更高的通道密度和蠕动泵浦。
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