Controller Design of a High-precision Sub-micron Positioning Stage
一种高精度亚微米级定位平台的控制器设计
摘 要
Abstract
Contents
Figure
Chapter1 Introduction
1.1 Fundamentals of Servo Control
1.2 Control Architecture for the Motorized Positioning System
1.2.1 Full-Closed-Loop Configuration
1.3 Background and Motivation
1.3.1 PID Design
1.3.2 Velocity Estimation
1.4 Hardware Configuration
1.5 Contents
Chapter2 Auto-tuning PID Strategy
2.1 Process Modeling of the Servo System
2.1.1 Current Loop Modeling
2.1.2 Velocity Loop Modeling
2.1.3 Position Loop Modeling
2.2 Direct Synthesis for Auto-Tuning PID Parameters
2.2.1 Survey of PID Designs
2.2.2 Proposed Control Structures for the Positioning System
2.2.3 PI Design in the Current Loop
2.2.4 PI Design in the Velocity Loop
2.2.5 PID Design in the Position Loop
2.3 Summary
Chapter3 Sensorless Strategy for Velocity Measurement
3.1 The Background and Motivation for Velocity Estimation
3.1.1 Drawbacks of Traditional Velocity Estimation
3.2 Kalman Filtering for Speed Estimation
3.2.1 System Modeling in a State-Space Expression
3.2.2 Noise Characteristics for the Kalman Filter
3.2.3 Kalman Filtering in the Digital Control Loop
3.3 Experiment
3.3.1 Improvement using the Proposed Algorithm
3.3.2 Results in Low Speed Range
3.3.3 Effect of Selecting Different Disturbance Covariance
3.4 Summary
Chapter4 Accuracy and Repeatability Test
4.1 Fundamentals of Accuracy and Repeatability
4.1.1 The Concept of Accuracy and Repeatability
4.1.2 The Metrology
4.2 Experimental Results
4.3 Analysis of Some Determining Factors for Accuracy and Repeatability
4.3.1 Thermal Expansion Effect
4.3.2 Effect of Trajectory Profile
4.4 Summary
Conclusion
Reference
攻读硕士学位期间所发表的论文
哈尔滨工业大学硕士学位论文原创性声明
哈尔滨工业大学硕士学位论文使用授权书
Acknowledgement
哈尔滨工业大学;
