METHOD FOR OPERATING A WORKING STAGE BEING RELATIVELY MOVED ON A PLATFORM AND INCLUDING A HIGH ACCURACY POSITIONING CAPACITY, AN OPERATING DEVICE, AND AN OPERATING SYSTEM THEREOF, CAPABLE OF PERFECTLY DETERMINING A POSITION

摘要

PURPOSE: A method for operating a working stage being relatively moved on a platform and including a high accuracy positioning capacity, an operating device, and an operating system thereof are provided to supply a metrology method and a metrology unit which are suitable for machining of a product of a large size.;CONSTITUTION: An operating device (10) for a working stage includes an operation driving module (11), a working stage (12), a speckle image acquisition module (13), and a control module. The operation driving module is stably connected to a platform (20). The working stage is connected to the operation driving module and is driven by the same. The working stage is relatively moved on the platform. The speckle image acquisition module is stably connected to the working stage in order to relatively move on the platform along the working stage. The control module controls the operation driving module based on the difference of a current position of the working stage and a target position so that the working stage moved towards the target position.;COPYRIGHT KIPO 2013