Friction and wear studies of hydrogenated amorphous carbon films containing silicon

摘要

The ratios of sp~2 to sp~3 content for a series of hydrogenated amorphous carbon-silicon systems were determined using molecular dynamics simulation. The values of elastic modulii were then determined for each system using constant tension and constant temperature molecular dynamics simulation method. The relationship between sp~2 to sp~3 content and modulii was investigated by varying Si and H content in the films. The thermal conductivity and heat capacity were also calculated for each system. A series of sliding simulations was used to determine which properties had the greatest effects on the resulting friction and wear behavior of the films.