A Numerical Model of the Pumping Mechanism of Vortex Stage in Dry High Vacuum Pump

摘要

This issue presents a horizontal dry high vacuum pump and establishes numerical models of gas flow in the vortex stage. Simulations were carried out with FLUENT software to study how the internal flow and work performance were influenced under different rounding of blades on the rotors. The results showed that different rounding had a great influence on the pumping performance. Considering comprehensively,the shape of cross section of flow channels should be adopted in the design of pump and the specific size of the fillet should be determined according to actual situation.