Experimental Study of the Pumping Mechanism of a Dry-Scroll Vacuum Pump

摘要

The validity of the theory concerning the pumping performance of a dry-scroll vacuum pump proposed by the authors has been examined using the following three experiments, (1)the separa- tion of the direct effect of orbiting speed on the ultimate pressure from the effect of clearance change with temperature change accompanying a change in orbiting speed, (2)the measurement of local pressure in the outermost pocket, (3)the measurement of the pumping speed throughout the working pressure range.