FABRICATION OF ON-CHIP SORTER DEVICES WITH SUB-MICROMETER SCALE CHANNELS AND SELF-ALIGNED MICROELECTRODES

摘要

Process technologies for the fabrication of microfiuidic devices with sub-micrometer scale fluidic channels and self-aligned electrodes have been studied. By employing these technologies, a prototype of the nanosorter device for the selective collection of sub-micrometer scale microparticles or cytoplasmic organelles has been fabricated.