PMN-PT single crystal thick films on silicon substrate for high-frequency micromachined ultrasonic transducers

摘要

In this work, a novel high-frequency ultrasonic transducer structure is realized by using PMNPT-on-silicon technology and silicon micromachining. To prepare the single crystalline PMNPT-on-silicon wafers, a hybrid processing method involving wafer bonding, mechanical lapping and wet chemical thinning is successfully developed. The active element is fixed within the stainless steel needle housing. The measured center frequency and -6 dB bandwidth of the transducer are 35 MHz and 34%, respectively. Owing to the excellent electromechanical property of PMNPT film, the transducer shows good energy conversion performance with a very low insertion loss down to 8.3 dB at the center frequency.