NANOMETER-SCALE DEPOSITION OF PHOTO-CURING RESIN USING A SCANNING NANOPIPETTE PROBE MICROSCOPE

摘要

Novel fabrication techniques of local surfaces were performed using a scanning probe microscope with various liquids filled nanopipette probes. Liquid state photo curing resin was successfully deposited on the substrate, then, the liquid resin could be cured with evanescent wave light generated by total internal reflection configuration in triangle prism attached under sample holder. Dot array structures could be realized. These fabrication techniques might be conceivable for many fields such as precision engineering and biological manipulations.