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Flash extreme ultraviolet holographic microscopy in a table top setup

机译：台式台式闪光灯的极端紫外线全息显微镜

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摘要

We present a single-shot Fourier transform holography setup with ～100nm spatial resolution and 1 ns temporal resolution using a tabletop extreme ultraviolet (EUV) laser. Flash images allowed for the imaging of nano-pillars oscillating at MHz frequencies that will enable the evaluation of mechanical properties of nanoscale mechanical oscillators.
机译：我们提出了一种使用台式超紫外（EUV）激光的约100nm空间分辨率和1 ns时间分辨率的单次傅立叶变换全息设置。闪存图像允许对以MHz频率振荡的纳米柱进行成像，这将有助于评估纳米级机械振荡器的机械性能。

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  • 会议地点 San Francisco CA(US)
  • 作者

    Nils C. Monserud; Erik B. Malm; Przemyslaw W. Wachulak; Huiwen Xu; Ganesh Balakrishnan; Weilun Chao; Erik Anderson; Mario C. Marconi;

  • 作者单位

    Engineering Research Center for Extreme Ultraviolet Science and Technology, and Electrical and Computer Engineering Department, Colorado State University, Fort Collins, Colorado 80523, USA;

    Engineering Research Center for Extreme Ultraviolet Science and Technology, and Electrical and Computer Engineering Department, Colorado State University, Fort Collins, Colorado 80523, USA;

    Institute of Optoelectronics, Military University of Technology, ul. gen. S.Kaliskiego 2, 00-908 Warsaw, Poland;

    Center for High Technology Materials, and Department of Electrical and Computer Engineering, University of New Mexico, Albuquerque, New Mexico 87106, USA;

    Center for High Technology Materials, and Department of Electrical and Computer Engineering, University of New Mexico, Albuquerque, New Mexico 87106, USA;

    Center for X-Ray Optics. Lawrence Berkeley National Lab, 1 Cyclotron Rd, Berkeley, CA 94720, USA;

    Center for X-Ray Optics. Lawrence Berkeley National Lab, 1 Cyclotron Rd, Berkeley, CA 94720, USA;

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