Thermodynamic, kinetic and mass transport calculations, as the basis for materials processing by CVD

摘要

What is the best way to optimise a CVD process? If all data are available (which is most improbable) it would be possible to achieve accurate modelling of a system with any degree of complexity. In reality, far fewer data exist, leading to a trade-off between system complexity and model complexity. Using numerous examples it will be demonstrated that it is often possible to satisfy the two main requirements. First of all, to provide information for the needs of experimentation, which is a pressing demand, and secondly, to reach a fundamental understanding of the chemistry involved in the CVD process, which is a long and exacting task.