Integrated On-chip Planar Solenoid Inductors with Patterned Permalloy Cores for High Frequency Applications

摘要

The on-chip magnetic inductors with patterned permalloy (Ni_(80)Fe_(20)) cores are fabricated on Si-substrates with different resistivities and thicknesses as well as on thin membranes. With the patterned permalloy cores, the on-chip magnetic inductors achieve high self-resonant frequencies over 25GHz in thin membranes. To distinguish the influence from the permalloy core patterns and substrate losses on the inductance and quality factor, multiple solenoids in series and parallel are designed to investigate the resistive, capacitive, and magnetic coupling losses.