Crystalling texture of CoCrPt films on CrMn/NiAl and Cr.NiAl underlayer structures

摘要

In this study, we examine the effects of CrMn/NiAl and Cr/NiAl underlayer structures on the crystalline texture and microstructure of CoCrPt magnetic films musing x-ray and electron diffraction. The former underlayer structure was found to induce better CoCrPt (10 10) texture. The stress in the CoCrPt layer was measured. The effective in-plane anisotropy energy densities of the CoCrPt films on the above two underlayers were also measured by using out-of-plane torque and Miyajima methods and the result was consistent with the texture analysis.