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PROCESS AND APPARATUS FOR PRODUCING CRYSTALLINE THIN FILM BUFFER LAYERS AND STRUCTURES HAVING BIAXIAL TEXTURE
PROCESS AND APPARATUS FOR PRODUCING CRYSTALLINE THIN FILM BUFFER LAYERS AND STRUCTURES HAVING BIAXIAL TEXTURE
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机译:制备具有双轴织构的结晶薄膜缓冲层和结构的方法和装置
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摘要
The invention provides a method of depositing a buffer layer or film onto a surface of a substrate. The method includes providing the substrate in a controlled atmosphere and exposing the substrate to a vapour comprising a film forming species. While the substrate is exposed to the vapour, two or more ion beams are provided incident upon the surface of the substrate to assist formation of the film. The respective axes of incidence of the two or more ion beams are distinct and are selected and controlled in order to maintain the arrival rate ratio, maximise the deposition rate, and maximise the biaxial alignment of the layer so formed.
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