The properties of CoCrPt/CrMn/NiAl and CoCrPt/Cr/NiAl films

摘要

In this study, the effects of CrMn/NiAl and Cr/NiAl underlayers on microstructure and magnetic properties of CoCrPt magnetic layers are compared. CrMn intermediate layers were found to induce better in-plane texture and magnetic properties in CoCrPt films than Cr. Significant improvement in magnetic properties was achieved by post-deposition rapid thermal annealing (RTA). The anisotropy did not decrease much while grain isolation in the CoCrPt layer was achieved by using RTA.