SEM/EDX SPECTRUM IMAGING AND STATISTICAL ANALYSIS OF A METAL/CERAMIC BRAZE

摘要

Energy dispersive x-ray (EDX) spectrum imaging has been performed in a scanning electron microscope (SEM) on a metal/ceramic braze to characterize the elemental distribution near the interface. Statistical methods were utilized to extract the relevant information (i.e., chemical phases and their distributions) from the spectrum image data set in a robust and unbiased way. The raw spectrum image was over 15 Mbytes (7500 spectra) while the statistical analysis resulted in five spectra and five images which describe the phases resolved above the noise level and their distribution in the microstructure.