DEVELOPING Aμ-FABRICATION COURSE: A STUDY IN MULTIDISCIPLINARY MEMS CURRICULUM DEVELOPMENT

摘要

The Georgia Institute of Technology is in the early stages of a broad-based, multi-disciplinary expansion of its work in MEMS technology. A principle goal of this effort lies in the construction of a comprehensive undergraduate and graduate curriculum that will help to prepare tomorrow's MEMS professionals. It is important to look beyond the standard methodologies of higher education to appropriately support this highly 'disruptive' and multi-disciplinary field. This paper briefly reviews the issues shaping curriculum development for MEMS technologies and examines the creation and offering of an introductory MEMS course with special emphasis on the laboratory section.