Molecular beam mass spectrometry studies of the thermal decomposition of tetrakis(dimethylamino) titanium

摘要

Tetrakis(dimethylamino) titanium (TDMAT) is an important precursor for TiN, TiCN, and TiSiN thin films in chemical vapor depositioin. In order to better understand how the gas phase chemistry influences the formation of thjese films, the decomposition of TDMAT has been studied in a high-temperature flow rector (HTFR) by moelcular beam mass spectrometry (MBMS). Two kinetic regimes have been observed as a function of temperature. Rate expressions and mechanistic implications will be presented. Further studies are in progress to identify the gas phase species relevant to the decomposition mechanism of TDMAT.