ADSORPTION AND OXD3ATION EFFECTS IN MICROCRYSTALLINE SILICON

摘要

Electron spin resonance and conductivity measurements were used to study adsorption and oxidation effects on microcrystalline silicon with different structure compositions ranging from porous, highly crystalline to compact, mixed phase amorphous/crystalline. We found a correlation between active surface area and the magnitude of observed meta-stable and irreversible effects.