PHOTOMAGNETIC DETECTION OF DOPING INHOMOGENEITIES IN SILICON CRYSTALS USING SQUID MAGNETOMETERS

摘要

The magnetic fields of photogenerated currents in semiconductor bulk materials can be measured with a SQUID magnetometer for a noninvasive and nonpolluting detection of doping inhomogeneities. The magnetic signal is to first order a measure of the doping gradient at the measuring position independent of the sample geometry. Applications of the method are shown and numerical simulations of the generation of the measured fields are presented.