Microstructures in Diamond for 'DMEMS', Diamond Micro Electromechanical Systems

摘要

The rapidly developing technology for forming MEMS (micro electromechanical structures) has lead to very dimensionally and electrically robust microstructures in silicon. Interestingly, many of these forms are also achievable in diamond films. Furthermore, micron dimensioned microlithography and etching techniques have been applied to diamond films to create, for example: Piezoresistors, Microtips, Pressure membranes/ micro windows, and Gated VFETs. This paper will describe the diamond microstructures of such microelements. It has been previously substantiated that diamond films could be processed similar to conventional semiconductor films such as silicon and gallium arsenide. In this paper we describe aspects to achieving a monolithic diamond resistor. The delineated diamond resistors are electrically characterized. Other diamond microelements are also considered.