A Systematic and Physically Based Method of Extracting a Unified Parameter Set for a Point-Defect Diffusion Model

机译：基于系统的基于物理的点缺陷扩散模型的统一参数集提取方法

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摘要

A systematic and physically based method for extracting of a unified parameter set for a point-defect diffusion model is proposed. A sensitivity matrix analysis is used to construct the sequence of the extraction and to select the data set to be fitted.

机译：提出了一种基于系统的，基于物理的方法来提取点缺陷扩散模型的统一参数集。灵敏度矩阵分析用于构建提取顺序并选择要拟合的数据集。

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来源
《Simulation of semiconductor processes and devices 1998(SISPAD98)》|1998年|364-367|共4页
会议地点 Leuven(BE);Leuven(BE)
作者
Hironori Sakamoto; Shigetaka Kumashiro; Hiroshi Matsumoto;
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作者单位

ULSI Device Development Laboratories, NEC Corporation 1120 Shimokuzawa, Sagamihara, Kanagawa 229-1198, Japan;

ULSI Device Development Laboratories, NEC Corporation 1120 Shimokuzawa, Sagamihara, Kanagawa 229-1198, Japan;

ULSI Device Development Laboratories, NEC Corporation 1120 Shimokuzawa, Sagamihara, Kanagawa 229-1198, Japan;

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原文格式 PDF
正文语种 eng
中图分类半导体器件制造工艺及设备;
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A Systematic and Physically Based Method of Extracting a Unified Parameter Set for a Point-Defect Diffusion Model

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