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Method of extracting parameters of diffusion model capable of extracting the parameters quickly
Method of extracting parameters of diffusion model capable of extracting the parameters quickly
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机译:能够快速提取参数的扩散模型参数的提取方法
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摘要
In a method of extracting parameters of a diffusion model from object parameters to be used in a process simulation of a semiconductor manufacturing process, classifying the object parameters into a first through an N-th (N being a natural integer not smaller than 2) groups, the first group being used for classifying thereinto the most fundamental physical and least model-dependent parameters, the N-th group being used for classifying thereinto the least fundamental physical and most model-dependent parameters, and extracting successively the classified parameters in the first through the N-th groups in the order from the first to the N-th group.
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