Thin film diamond temperature sensor array for harsh aerospace environment

摘要

Abstract: In the harsh aerospace environment associated with a hypersonic vehicle, most conventional temperature sensors are rendered unsuitable. The remarkable combination of physical and electronic properties of chemical vapor deposited (CVD) diamond films especially high thermal conductivity, chemical inertness, radiation immunity, and wide energy band gap propose their possible application as high speed temperature sensors operating at elevated temperatures under such environment. Recent developments in the deposition, doping, patterning, and metalization of CVD diamond films provide the basic fabrication technology for a micro-miniaturized temperature sensor array. This is expected to lead to fast temperature measurement and subsequent heat flux computation with high spatial resolution. However, the requirement of placing the sensors on the curved surface of a cylindrical substrate made of high thermal and electrical resistivity material presents a major technological problem. This report deals with the fabrication technology of a thin film diamond temperature sensor array on flat and curved cylindrical surfaces, and presents the resistance measurements of diamond sensors up to 1000$DGR@C. !7