Department of Mechanical Engineering, National Central University, Chugn-Li City, Taiwan, Republic of China;
Department of Mechanical Engineering, National Central University, Chugn-Li City, Taiwan, Republic of China;
Department of Mechanical Engineering, National Central University, Chugn-Li City, Taiwan, Republic of China;
Department of Mechanical Engineering, National Central University, Chugn-Li City, Taiwan, Republic of China;
机译:组合表面活化键合技术用于低温亲水性直接晶圆键合
机译:低温下通过氩气束表面活化实现透明导电GaSb / Si晶圆直接键合
机译:通过等离子体激活将GaAs低温直接晶圆键合到Si
机译:通过氮等离子体活化和氢氟液预浸渍,增强低温Si_3N_4 / Si_3N_4直接晶片键合的粘合强度
机译:表面活化增强了低温硅晶圆键合。
机译:金膜厚度和表面粗糙度对室温晶圆键合和金-金表面活化键合的晶圆级真空密封的影响
机译:低温下通过氩气束表面活化实现透明导电GaSb / Si晶圆直接键合