Department of Material and Bio-Nano Engineering, Hanyang University, Ansan 426-791, Korea;
Department of Material and Bio-Nano Engineering, Hanyang University, Ansan 426-791, Korea;
Department of Material and Bio-Nano Engineering, Hanyang University, Ansan 426-791, Korea;
RD center, Zeus co. Ltd., Osan 164-1, Korea;
SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University, Suwon 300, Korea;
SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University, Suwon 300, Korea;
SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University, Suwon 300, Korea;
Department of Material and Bio-Nano Engineering, Hanyang University, Ansan 426-791, Korea;
机译:通过CO_2气体簇碰撞去除纳米大小的表面颗粒进行干洗
机译:使用二氧化碳(CO2)气体团簇清洁去除纳米颗粒,不会损坏图案
机译:超声和大声波清洗氨水溶液中纳米级图案的适合性,用于去除颗粒和破坏特征
机译:纳米气体簇干洗损坏免颗粒去除
机译:利用激光诱导的等离子体对光刻光掩模上的纳米膜进行材料改变和无损伤纳米颗粒去除。
机译:纳米悬浮液的喷雾冷冻干燥:制造胰岛素颗粒用于无针弹道粉末递送
机译:使用活性炭对生物质气化气体进行热干洗,同时去除焦油,颗粒和硫化合物
机译:通过添加干燥吸附剂用陶瓷过滤器去除颗粒和酸性气体(s(sub 2)或HCl)